Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : A17
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Host: The Japan Society for Precision Engineering

Formation of Through-Chip Porous Noble Metal Layers on Silicon Substrates
*Taku Matsuzaka, Junnichi Shimanuki, Masanori Hayase
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Keywords: porous silicon layers, porous metal layers, galvanic displacement, MEMS
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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