Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : E19
Conference information

Host: The Japan Society for Precision Engineering

Investigation of the promotion mechanism about Si3N4 polishing rate
*Akihito Yasui, Kazusei Tamai, Hitoshi Morinaga
Author information
Keywords: CMP, silicon nitride, DLVO
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (457K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2009 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top