Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : E21
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Host: The Japan Society for Precision Engineering

Measurement of Fluid Pressure Distribution in CMP Process
Norikazu Suzuki, *Yosuke Adachi, Yohei Hashimoto, Ko Suzuki
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Keywords: CMP, fluid pressure, wafer profile, coupled fluid-structure analysis, remote sensing system
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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