Abstract
Recently multi legged walking robots are widely developed. For these robots to walk safely, a sole sensor with high performance is desired. In the present paper, an arrayed type tactile sensor made of flexible silicone rubber such as PDMS (poly-dimethyl-siloxane) is practically developed based on micro-electro-mechanical-systems (MEMS) technology. By processing the force data from many sensing elements using neural networks, information of contact force, i.e., three dimensional x, y, and z components of force vector, can be detected, which is confirmed by both simulation and experiment.