Study on Effect of Dressing Method on Pad Surface Characteristics in Polishing Technique

Application of Evaluation Parameters to Commercially Available Apparatus

Abstract

In this study, we aim to present parameters that can be used to evaluate pad surface conditions. Therefore, we discuss based on distribution analysis method of surface roughness profiles and contact image method using image rotation prism. Our previously report showed the results obtained by laboratory apparatus as fundamental experiment. This paper shows the results of application characteristics of presented evaluation parameters to commercially available apparatus. As the results, (1) the deviation value based on the roughness profiles, and (2-1) the contact ratio, (2-2) number of contact points and (2-3) spatial FFT results of a contact image were found to be effective for evaluating pad surface conditions.