Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : N23
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Host: The Japan Society for Precision Engineering

Study on pad conditioning in CMP (6th report)
Study on pad pre-conditioning technology using flexible fiber conditioner
Takashi Fujita, *Akihiko Kurihara, Toshirou Doi
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Keywords: CMP, Pad Dressing, Flexible Dresser
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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