Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : N23
Conference information

Study on pad conditioning in CMP (6th report)
Study on pad pre-conditioning technology using flexible fiber conditioner
Takashi Fujita*Akihiko KuriharaToshirou Doi
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Abstract
[in Japanese]
Content from these authors
© 2009 The Japan Society for Precision Engineering
Previous article Next article
feedback
Top