Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : D19
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Masaki Ueda, Tetsuya Morikawa, Kazuya Yamamura, Masafumi Shibahara
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Keywords: quartz crystal, wafer, atmospheric pressure plasma, numerically controlled
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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