Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : D77
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Host: The Japan Society for Precision Engineering

Planarization of a rectangular glass wafer by oscillation speed control polishing (2nd report)
Polishing characteristics of a rectangular glass wafer
*Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida
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Keywords: flat panel display, photo mask, rectangular glass wafer, planarization, polishing simulation
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Abstract
[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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