Abstract
In this study, a novel fabrication method for fabricating a microcoil structure was developed by utilizing polydimethylsiloxane (PDMS) as a three-dimensional (3D) mold material. The developed fabrication method was consisted of pre and post-processes. As a first step of pre-process, a master pattern with a spiral structure of microcoil shape was accurately transferred to a mold cavity shape by pouring and hardening PDMS surrounding a mater pattern. Within the cavity of the fabricated 3D PDMS mold, an ultraviolet (UV) curable resin structure was precisely replicated along the surface of a cylindrical Al wire deposited with Au-Ti. This replicated UV curable resin replica was utilized as the base component for the fabrication of a microcoil structure by electroplating. Finally, a microcoil structure was fabricated by a post-process containing electroplating, dry and wet etching. An outer diameter, line width and coil thickness of the fabricated a microcoil structure were 538, 12.3 and 8.2 µm, respectively.
