Direct measurement of spindle error motion using regular crystalline lattice and scanning tunneling microscope

Frequency component of spindle radial error motion and rotational speed

Abstract

We have proposed the two-dimensional (2-D) atomic encoder method in which the scanning tunneling microscope (STM) and the regular crystalline lattice were used. This method has been expected to be applicable to the spindle radial motion error measurement. However, the method has the limitation of the measurement speed (100nm/s), therefore, the spindle and its rotational speed must be designed appropriately according to the speed of the atomic encoder. In this paper, the radial error motions of 2 types of spindles are examined using the Donaldson reversal method to investigate they are suitable for the 2-D atomic encoder or not.