Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : G19
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Concentric measurement of spindle radial, axial and angular motions using concentric circle grating interferometer
(1st report: Measurement principle and error analysis)
*Masato AketagawaMadden MuhummadYuria OhkuboShouhei KimuraEiki Okuyama
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
We propose the grating interferometer which can determine lateral and vertical displacement of the grating using grating 0th and +-1st order diffraction lights. And we propose the concentric measurement method of spindle radial, axial and angular motions using the grating interferometers. Measurement principle and error analysis are discussed.
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© 2009 The Japan Society for Precision Engineering
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