Abstract
The position of 2-D stage which has two straight edges in X and Y-direction is measured by laser interferometer. This measuring result includes two kinds of errors which are motion errors of the stage and profile errors of the reference mirrors. Multi-point method is generally used in measuring straightness. However, multi-point method includes zero-adjustment errors. So we proposed the new method that a single probe was used for each axis measurement. It isn′t necessary to consider zero-adjustment errors in the proposed method.The reference mirror was assumed to have profile error.Them the profile error is distinguished from the axis profile.In this paper, The reference mirror is assumed to consist of many small mirrors.Then the location and tilt angle of each mirror distinguished from two axis profile.
