Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : K10
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Host: The Japan Society for Precision Engineering

High reliable MEMS gyroscopes
*Munenori Degawa, Hee-Won Jeong, Kiyoko Yamanaka, Hisao Sonobe, Yasushi Goto
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Keywords: MEMS
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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