Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : K11
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Host: The Japan Society for Precision Engineering

Highly stable control of MEMS mirrors using PWM ac drive
*Naru Nemoto, Joji Yamaguchi, Fusao Shimokawa
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Keywords: MEMS, PWM control, ac drive
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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