Abstract
Vertical-scanning interferometries using white light are widely used to measure 3D shape of small step-like objects with high speed and high precision. This type of interferometry is being refined for more precision, more speed and more stable even in vibrating environment. In this key-note speech, I summarize our research processes to obtain high-speed and high-precision performance in 3D-shape measurement. Our processes have included technologies using two color LED, new phase shift algorithm, and an optical path difference(OPD) meter. I briefly compare our technologies with newly proposed techniques. I hope my comparison will stimulate many kinds of discussions.
