A trial of the evaluation of aspherical lens using phase shift shearing interferometer with plane parallel plate

Abstract

In this report, a trial of the evaluation of aspherical lens using phase shift shearing interferometer with plane parallel plate are discussed. Shearing interferometry is a measuring method by interference between a wave front under test and itself but sheared slightly. The method is robust to disturbances because it is a common path interferometry. Moreover it is not necessary to prepare reference surface. Therefore it can be said that it is a practical measuring method.