Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : K37
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Host: The Japan Society for Precision Engineering

Vertical-displacement measurement of a rough surface observed by an interference microscope
*Masaaki Adachi, Masanori Kawamura, Yuuta Iwao
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Keywords: interferometer, rough surface, displacement measurement, microscope
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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