Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : M69
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Host: The Japan Society for Precision Engineering

Effects of ultrasonic vibration on micro drilling with micro PCD drill
*Osamu Ohnishi, Hiromichi Onikura, Ryoma Torigoe, Hiroshi Mizue, Yukihito Kido
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Keywords: PCD Drill, Micro Drilling, Ultrasonic Vibration
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Abstract
This paper deals with the fabrication of micro PCD drills with a nominal diameter of 300 μm and their application. The fabricated drills were used in the drilling into quartz glass. In the drilling test, characteristics of the drilling and effects of ultrasonic vibration were investigated.
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© 2009 The Japan Society for Precision Engineering
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