Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn Conference
Session ID : K46
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Host: The Japan Society for Precision Engineering

Surface machining of 4H-SiC substrate by an iron and steel tools
*Akihisa Kubota, Takashi Watayo, Yoshitaka Nakanishi, Mutsumi Touge
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Keywords: SiC, polishing
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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