Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn Conference
Session ID : M33
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Host: The Japan Society for Precision Engineering

On the influence of a damper in the PZT precise positioning mechanism
*Masashi Ikegami, Akira Sakurada, Akihiro Naganawa, Katsuaki Sunakoda, Yotsugi Shibuya, Shigeki Mori, Goro Obinata
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Keywords: Precise Positioning, Piezoelectric Element, Damper, Modeling, Transient Response
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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