Hydrothermally Deposition of a PZT Thin Film on the Wire Electric Discharged Titanium Surface

Abstract

By using a hydrothermal method, PZT thin film can be easily deposited on the curved surface. This is suitable for fabricating micro actuators using piezoelectric thin film. We fabricated monolithic actuator by wire-electric-discharging the titanium plate as base material. When the surface roughness of the wire electric discharged surface is larger than the size of PZT crystal, the driving voltage can′t be applied between the electrodes. In this study, we have improved the wire electric discharged titanium surface and have deposited a PZT thin film. We have also evaluated the actuator driven by hydrothermally deposited PZT thin film.