Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : R43
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Host: The Japan Society for Precision Engineering

Fabrication of nano-scale high aspect ratio mold and measurement of release force during replication of polymer
*Junki Takahashi, Yasuhiro Kamiya, Jun Taniguchi
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Keywords: Nanoinprint, Release force, Aspect ratio, Glassy carbon
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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