Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : R44
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Host: The Japan Society for Precision Engineering

Nanoimprint Lithography without Residual Layer by Titanium Dioxide
*Makoto Shimoda, Keisuke Nagatou, Tatsuya Hamaguchi, Masayuki Nakao
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Keywords: Nanoimprint lithography, Titanium Oxide
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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