Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : R45
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Host: The Japan Society for Precision Engineering

Study of two-tone nanoprint transfer technique using same stamp surface
*Noriyuki Unno, Jun Taniguchi
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Keywords: Nano print transfer, Spin on glass, Metal patterning, Metal oxide release layer
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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