Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : E37
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Host: The Japan Society for Precision Engineering

Non-invasive measurement for 3D nanostructure using phase-shift digital holography
Measurement for micro glass sphere
*Kenshiro Ohtsubo, Terutake Hayashi, Yasuhiro Takaya
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Keywords: digital holography
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Abstract
[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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