Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : E38
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Host: The Japan Society for Precision Engineering

Thin-Film Thickness Evaluation for Nano-Imprint by using Near-Field Optics(6th Report)
Development and Verification of Thin-Film Thickness Measurement System Using Metal Probe
*Tempei Nagao, Yuichi Ikeda, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: nanoimprint, near field light, metal probe, shear force
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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