2011 JSPE Autumn Conference
Session ID : F64
Conference information
Host: The Japan Society for Precision Engineering
Study on Sapphire CMP slurries using fullerenol as fine particles
Investigation of polishing performance based colloidal silica slurry
*Takashi Saito, Keisuke Suzuki, Khajornrungruang Panart, Erika Karasudani, Keiichi Kimura
Author information
Details
