Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : I64
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Host: The Japan Society for Precision Engineering

A Study on Ultraprecision Machining of Single Crystal SiC Substrate
*Yuya Ichimori, Akihisa Kubota, Mutsumi Touge
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Keywords: Ultra-precision polishing
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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