2011 JSPE Autumn Conference
Session ID : I67
Conference information
Host: The Japan Society for Precision Engineering
Study on high efficiency polishing method of single-crystal SiC under ultraviolet rays irradiation
*Yuki Sawami, Takeshi Sakamoto, Mutsumi Touge, Keishi Yamaguchi, Akihisa Kubota, Hiroyuki Yokoi, Junji Watanabe
Author information
Keywords:
Ultra Precision Polishing
Details
