Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : J82
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Yuya Ishikawa, Mitsuru Nakamura, Masaya Takasaki, Mai Takashima, Naoto Ohtake, Takeshi Mizuno
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Keywords: ultrasonic motor, surface acoustic wave, segment-structured diamond-like carbon
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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