A basic study on the sampling rate in the positioning control of an air bearing lead screw stage

Abstract

It has been popular to use the sampled data control in positioning a mechanical stage system. Choosing a proper sampling rate in positioning control is important to improve the positioning accuracy and responsiveness. For this purpose, we make a control system that has a high speed sampling rate in order to control the position of an air bearing lead screw stage. In this paper, the characteristics of the mechanism and the results of the positioning control are described.