Basic Study on Cell-in-Microfactory System with Localized Light Control (1st report)

Verifying of basic function of micro removal processing with photo catalyst nano TiO2 particles

Abstract

Downsizing fabrication system is important for industry in cost efficiency. Modification and micro process of micro scale material is also important. In this study, we propose ″Cell in Micro-factory System″, which processes and fabricates microstructure in a micro cell. As the first step, in order to develop processing tools of this system, we experimentally study feasibility of a new processing method using a photo catalyst, TiO2, nano particle as a processing tool, which is excited with light energy.