Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : O38
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Host: The Japan Society for Precision Engineering

Development of Error Estimation Method of Phase Detection in Phase Shift Method
*Ryohei Hanayama, Kenichi Hibino
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Keywords: Phase Shift Method, Phase Detection Algorithm, Optical Interferometry, Window Function
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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