2011 JSPE Spring Conference
Session ID : B79
Conference information
Host: The Japan Society for Precision Engineering
High-efficient and High-precision Machining of Micro-die by Excimer Laser
*Hiroyuki Yamada, Michiyoshi Nishimura, Yoshikazu Yoshida, Nobuyuki Katsumata, Wako Miyagawa
Author information
Keywords:
micro die,
laser ablation
Details
