Development of linear-motor-driven table sustained by hydrostatic water bearings

Improvement of table pitching motion using a magnetic balancer

Abstract

A linear-motor-driven table supported by hydrostatic water bearing was developed in our earlier experiment. The table is supported by a single-sided-recess type bearing and preloaded by attractive force of the linear-motor magnet. Eccentric excitation force is generated during the table motion due to the attractive-force change of the magnet truck. The resulting maximum pitching angle was 0.25″and the pitching interval was 30mm, which equals to the permanent-magnet interval of the magnet track. In order to suppress the pitching motion, a magnetic balancer is added at the end of the table slider. The effect of the position of magnetic balancer on table pitting motion is experimentally investigated.