Development of composite abrasives for various materials

Abstract

It was reported previously that development of composite abrasives considering cleanability of workpeace. Glass polishing using composite abrasives improved cleanability and the polishing characteristics in comparison with a conventional polishing. In this study, we investigated the application of the composite abrasives to polishing of various materials which are metals, semiconductor and optical materials. For composite abrasives adapted to various materials polishing, we supply new manufacturing method of composite abrasives and new mother particle. The experimental results showed that the removal rate of metal polishing using composite abrasives can be improved by employing suede type polishing pad.