Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : D19
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Host: The Japan Society for Precision Engineering

Relationship between the surface structure of polishing pad and the polishing performance of composite abrasives.
*Junji Murata, Yasuhiro Tani, Takeshi Yanagihara, Miyuki Yamada, Yu Zhang
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Keywords: composite abrasive, polishing pad, cerium oxide, glass
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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