Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : D22
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Host: The Japan Society for Precision Engineering

Improved polishing performance of glass by a treatment of polishing pad surfaces.
Junji Murata, Yasuhiro Tani, Yu Zhang, *Okiharu Kirino
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Keywords: polishing pad, glass, surface coating, cerium oxide
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Abstract
[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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