2011 JSPE Spring Conference
Session ID : D33
Conference information
Host: The Japan Society for Precision Engineering
Superfinishing characteristics of single crystal silicon with mechanochemical superabrasive stone containing BaSO4 abrasive
*Yu Hiramine, Naomichi Furushiro, Masahiro Higuchi, Tomomi Yamaguchi, Noboru Matsumori, Hidekazu Ogura
Author information
Keywords:
Superfinishing,
Single crystal silicon,
Mechanochemical superabrasive stone,
Barium sulfate
Details
