Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : D46
Conference information

Host: The Japan Society for Precision Engineering

Development of non-deformation freezing pin chuck(4th report)
Polishing characteristics in coagulating temperature of freezing liquid
*Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida, Yuji Ogawa
Author information
Keywords: non-deformation chuck, freezing liquid, quartz glass wafer, polishing, low temperature
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (580K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2011 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top