2011 JSPE Spring Conference
Session ID : E03
Conference information
Host: The Japan Society for Precision Engineering
Evaluation of Conditioned Polishing Pad Surface Topography based on Fourier Transform Analysis and its Polishing Characteristic
*Takahisa Okuzono, Keiichi Kimura, Panart Khajornrungruang, Keisuke Suzuki, Takashi Kushida
Author information
Keywords:
Chemical Mechanical Polishing,
Spatial Frequency Analysis,
Polishing Pad,
Surface Topography,
Polishing Characteristic,
Conditioning
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