Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : E09
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Host: The Japan Society for Precision Engineering

Study on measurement evaluation for large, flat and thin Si wafer
- 2nd report : Study on de-noising by use of complex wavelet transform -
Libo Zhou, *Masashi Ono, Kazutaka Nonomura, Hirotaka Ojima, Teppei Onuki
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Keywords: Wavelet transform, De-noising, Si wafer, Flatness evaluation
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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