Abstract
Conventional ceria-based abrasive shows an excellent glass polishing performance. However, decreases of total amount of cerium and/or development of alternate abrasives are required from the viewpoint of the supply instability of cerium. Therefore, the mechanism of glass polishing using the conventional abrasive is necessary to be clarified for development of alternate abrasives. We have paid particular attention to the effect of rare-earth doping into ceria abrasives on the glass polishing performance, because La has been revealed to be resolved into ceria lattice. Glass polishing using rare-earth doped ceria abrasives revealed that the doping has a positive effect on the polishing performance. Moreover, the polishing performance of doped ceria was found to depend on the dopant element.
