Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : F47
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Host: The Japan Society for Precision Engineering

Proposal of Spiral Ultrasonic Vibration Assisted Grinding Method and its Fundamental performance in Monocrystal Silicon Grinding
*Yongbo Wu, Zhiqiang Liang, Masakazu Fujimoto, Weimin Lin
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Keywords: Ultrasonic vibration, Grinding, Machining characteristics, Monocrystal Silicon
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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