Thermal displacement drift decrease of precision positioning device whose motor is cooled by Peltier module

Abstract

On the precision positioning device composed of the motor and ball screw with open loop or semi-closed control, the main heat source of the motor deforms the device. As a result, the thermal positioning drift error is generated as well as tilting motion of the stage. We expect that such an error and motion are decreased by cooling the motor whose shaft is connected to the screw shaft, when the device temperature becomes the surrounding temperature. We made it sure that thermal drift was decreased on the precision positioning device with 300mm stroke stage by Peltier cooling effect.