Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : G23
Conference information

Host: The Japan Society for Precision Engineering

High Flatness Polishing of Fused Quartz with Magnetic Compound Fluid (MCF)
*Ryutaro Mori, Yongbo Wu, Masakazu Fujimoto, Weimin Lin, Kunio Shimada
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Keywords: Magnetic Compound Fluid, Fused quartz, Flatness polishing
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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