Micromachining of Hard and Brittle Materials by Cavitation Aided Ultrasonic Vibration Cutting

Abstract

Micro drilling has several serious problems; a tool breakage and low machining efficiency due to low tool rigidity and poor chip removal. To solve these problems, drilling methods which assist ultrasonic vibration to tool (USV drilling) or machining fluid (cavitation drilling) have been studied. In this study, effects of both USV and cavitation on micro drilling of SiC are investigated. The cutting force is remarkably decreased just after applying USV to drilling process. And assistance of cavitation prevents the chip adhesion on tool. As a result, both drilling methods improved the tool life. Furthermore, to obtain still longer tool life, the drilling method which is a hybrid of USV drilling and cavitation drilling is proposed.