An Application of Tapping-Mode AFM to Evaluating Vibrations of MEMS Resonators

Abstract

Vibrations of MEMS resonators were evaluated using AFM cantilever in tapping mode. To investigate the interference of the tapping with a resonator, firstly the flexural resonance (4.5MHz, 1.2nm) of the resonator was_measured by laser Doppler interferometer as a reference and secondly measured by tapping-mode AFM. Both resonant curves agreed well and this agreement was verified by a numerical analysis of the tapping mechanism.