Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : J77
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Host: The Japan Society for Precision Engineering

Piezoelectric-Actuated MEMS Micromirror Characteristics Dependence on Temperature Around Resonant Frequency
*Nobutomo Morita, Toshihiro Takeshita, Takeshi Kobayashi, Ryutaro Maeda, Toshihiro Itou, Renshi Sawada
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Keywords: MEMS, micromirror, microscanner, piezo actuator
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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