Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : L08
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Host: The Japan Society for Precision Engineering

Electrostatic manipulation of a micro-conductive particle with short particle-plate distance
*Daizo Nakabayashi, Kenji Sawai, Kunio Takahashi, Shigeki Saito
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Keywords: probe, manipulation, electrostatic force, micro, conductive particle, BGA(Ball Grid Array)
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Abstract
[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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